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Brooks Instrument Compact Capacitance Manometer, CMC Series

CMC Series Compact Capacitance Manometer

Brand: Brooks Instrument
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CMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges. 

Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.

Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces. 

The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability.
Features
  • Available for process ranges from 10 Torr to 1,000 Torr
  • Two accuracy levels available: 0.25% or 0.50% of reading (optional)
  • Exceptional performance over a wide range of operating temperatures
  • 40% smaller than traditional unheated capacitance manometers
  • All-welded construction and Inconel® wetted surfaces
Benefits
  • Optional high accuracy calibration matches the accuracy of more costly premium unheated manometers
  • Best-in-class zero and span temperature coefficients
  • Space-saving design helps fit device into tight machine spaces
  • Optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses

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Specifications

Brand

Accuracy

  • ±0.25% of Reading
  • ±0.5% of Reading Optional

Expose Material

  • Inconel

Compensated Temperature

  • 0° to 50° C (30° to 130° F)

Operating Temperature

  • 0° to 80° C (-32° to 176° F)

Response Time

  • 20 milliseconds

Input Power

  • 12-30 Vdc

Power Consumption

  • < 200 mW

Fitting Connection

  • KF10
  • KF16
  • KF25
  • 8 VCR F
  • 4 VCR M
  • 4 VCR F
  • 1/2” Tube Stub
  • 1/4” Tube Stub

Pressure Type

  • Absolute

Resolution

  • ≤ 0.0006 % of Full Scale Limited by Output Noise

Pressure Range

  • 10 to 1,000 Torr Full Scale
  • psi: 0.19 to 19.33 (kPa: 1.31 to 133.27, bar: 0.01 to 1.33)

Output Signal

  • 0-10 Vdc (<10 KΩ Load)

Electrical Connectors

  • 15-Pin D-Sub on 6” (152.4 mm) Cable
  • 5-Pin Terminal Strip
  • 9-Pin D Sub

Temperature Effect

  • Span: 0.027 % of Reading/°C
  • Zero: 0.005 % of Full Scale/°C

Overpressure & Static Pressure Limits

  • Over Pressure - psia: 45 (kPa: 310.3, bar: 3.1)

Approvals & Certifications

  • REACH
  • CE
  • EMC Directive 89/336/EEC
  • ISO 9001
  • RoHS

  • Semiconductor Fabrication
  • Thin-Film Deposition Processes - Glass, Web & Optical Coatings
  • Freeze Drying Perishable Materials
  • High-Tech Coatings for Medical Instruments (Surgical Instruments, Dental Drills, etc.)

Documentation

Data Sheets

Product Manuals

Certifications

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