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Instantly add the UHP Surface Mount Diaphragm Valve - Manual or Air-Actuated (Vacuum to 250 psig) - SM930 Series and 50,000+ more product series to your store or catalog  
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UHP Surface Mount Diaphragm Valve – Manual or Air-actuated (vacuum to 250 psig) – SM930 Series

UHP Surface Mount Diaphragm Valve - Manual or Air-Actuated (Vacuum to 250 psig) - SM930 Series

Brand: Parker Hannifin
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The SM930 Series is available with a variety of manual operators and air-operated actuators. 

It provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor modular surface-mount system applications.

Specifications

Brand

Actuation Pressure

  • 75 psig (5 barg) Nominal

Bake-Out Temperature (°C)

  • 121° C in Open Position

Bake-Out Temperature (°F)

  • 250° F in the Open Position

Body Material

  • VeriClean 316L Stainless Steel

Burst Pressure

  • 375 psig (26 barg) (LPNC, LPNO, LP1NC, G)750 psig (52 barg) (I, K, M)

Cap Material

  • 17-4 Stainless Steel

Diaphragm Material

  • Elgiloy, Equivalent

External Leak Rate

  • < 2 x 10-10 Scc/sec He

Flow Capacity (Cv)

  • Cv 0.25 (LP)Cv 0.20 (1/4 Turn Manual)

Internal Leak Rate

  • < 1 x 10-9 Scc/sec He

Maximum Inlet Pressure (psi)

  • 125 psig (8.6 barg) (LPNC, LPNO, LP1NC, G)250 psig (17 barg) (I, K, M)

Maximum Working Temperature (°C)

  • 66° C

Maximum Working Temperature (°F)

  • 150° F

Minimum Inlet Pressure (psi)

  • Vacuum

Minimum Working Temperature (°C)

  • -40° C

Minimum Working Temperature (°F)

  • -40° F

Nut Material

  • 316L Stainless Steel

Proof Pressure

  • 188 psig (13 barg) (LPNC, LPNO, LP1NC, G)375 psig (26 barg) (I, K, M)

Seat Material

  • PCTFE (Standard), PEEK, Vespel

Surface Finish (Ra)

  • 5 Micro inch Ra or Less
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