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UHP Surface Mount Diaphragm Valve - Manual or Air-Actuated (Vacuum to 250 psig) - SM930 Series
Brand: Parker HannifinThe SM930 Series is available with a variety of manual operators and air-operated actuators.
It provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor modular surface-mount system applications.
Specifications
Brand
Actuation Pressure
- 75 psig (5 barg) Nominal
Bake-Out Temperature (°C)
- 121° C in Open Position
Bake-Out Temperature (°F)
- 250° F in the Open Position
Body Material
- VeriClean 316L Stainless Steel
Burst Pressure
- 375 psig (26 barg) (LPNC, LPNO, LP1NC, G)750 psig (52 barg) (I, K, M)
Cap Material
- 17-4 Stainless Steel
Diaphragm Material
- Elgiloy, Equivalent
External Leak Rate
- < 2 x 10-10 Scc/sec He
Flow Capacity (Cv)
- Cv 0.25 (LP)Cv 0.20 (1/4 Turn Manual)
Internal Leak Rate
- < 1 x 10-9 Scc/sec He
Maximum Inlet Pressure (psi)
- 125 psig (8.6 barg) (LPNC, LPNO, LP1NC, G)250 psig (17 barg) (I, K, M)
Maximum Working Temperature (°C)
- 66° C
Maximum Working Temperature (°F)
- 150° F
Minimum Inlet Pressure (psi)
- Vacuum
Minimum Working Temperature (°C)
- -40° C
Minimum Working Temperature (°F)
- -40° F
Nut Material
- 316L Stainless Steel
Proof Pressure
- 188 psig (13 barg) (LPNC, LPNO, LP1NC, G)375 psig (26 barg) (I, K, M)
Seat Material
- PCTFE (Standard), PEEK, Vespel
Surface Finish (Ra)
- 5 Micro inch Ra or Less