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AP500 Single Stage Compact Regulator

Brand: SMC Corporation

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries.

 The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. 

Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
Features
  • For UHP gas delivery
  • Flow capacity: standard to 15 slpm; HF (option) to 30 slpm
  • Body material: 316L SS secondary remelt
  • Hastelloy® internals available for corrosion resistance
  • Sub-atmospheric pressure delivery option

Specifications

Body Material

  • 316L SS

Delivery Pressure

  • 0.5 to 100 psig (0.0034 to 0.7 MPa)
  • Sub-atmpspheric: 100 mm Hg Absolut to 10 psig (-88 kPa to 0.07 MPa)

Material of Construction

  • Poppet: 316L SS, Hastelloy C-22
  • Diaphragm: Elgiloy
  • Nozzle: 316L SS
  • Seat: PCTFE, PTFE, Vespel

Source Pressure

  • Vacuum to 150 psig (1.0 MPa)

Proof Pressure

  • Inlet 500 psig (3.4 MPa)

Burst Pressure

  • 1,000 psig (6.9 MPa)

Ambient Operating Temperature

  • -40° to 160° F (-40° to 71° C) No Freezing

Cv

  • 0.6

Connection

  • Face Seal
  • Tube Weld

  • UHP Gas Delivery

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