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Instantly add the Model 5850EMH / 5851EMH High Temperature Mass Flow Controller and 50,000+ more product series to your store or catalog  
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Brooks Instrument Mass Flow Controller, Model 5850EMH & 5851EMH

Model 5850EMH / 5851EMH High Temperature Mass Flow Controller

Brand: Brooks Instrument
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Offering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak integrity of metal seals with a variety of options allowing maximum application flexibility. 

The heart of the 5850EMH Series is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit.
Features
  • High leak integrity (less than 10-11 Pa.m3/s (10-10 atm.cc/s) He)
  • Wide flow range (0.003 – 100 slpm)
  • High-purity VAR 316L Stainless Steel
  • Particulate-free
  • Helium leak check ports
  • Normally closed valve (normally open valve optional)
  • Electrically-activated valve override
  • Low command flow cutoff
  • TTL compatible “valve off” function
Benefits
  • Stable, proven product platform
  • High flow capability up to 100 lpm (N2 equivalent)
  • All-metal flow path enhances gas purity and reduces leaks
  • Easily installed and serviced with analog only input/outputs

View_Details

Specifications

Brand

Seal Material

  • Metal

Control Range

  • 5 to 100%

Wetted Materials

  • 316L, 316L VAR & High Alloy Ferric Stainless Steel

Operating Temperature

  • 50° to 105° C (122° to 221° F)

Pressure Rating

  • Maximum 1 MPa (145 psi)

Power Requirement

  • 350 mA at 15 Vdc (Max.)

Differential Pressure

  • psid: 7 to 50 (kPa: 48.26 to 344.7, bar: 0.4826 to 3.447)

Flow Rate (Full Scale Capacity)

  • 0.003 to 30 lpm (N2 Equivalent) (5850EMH)
  • 10 to 100 lpm (N2 Equivalent) (5851EMH)

Accuracy

  • ± 1% of Full Scale

Repeatability

  • < ± 0.25% of Rate

Response Time

  • < 3 sec

Process Conenction

  • 1/4” MVCR
  • 3/8-1/2” Male VCR

Valve Type

  • Normally Closed
  • Normally Open

  • Optical Fiber Manufacturing – MCVD, OVD, AVD
  • Water Vapor Flow Control 

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