9861 Series Mass Flow Controller/Meter

Originally developed by Unit Instruments (later Celerity Inc.), the 9861 Series of high temperature mass flow controllers and meters continue to be manufactured using the same supply chain and copy exact process by Brooks Instrument who acquired the IP and assets of Celerity Inc. in 2009. 

The 9861 Series remains the optimum choice for critical precursor and dopant vapor delivery in semiconductor and optical fiber manufacturing. 

The 9861 Series are thermal mass flow controllers and meters designed for challenging high temperature delivery of condensable precursors and dopants. 

A high purity, high leak integrity metal flow path ensures compatibility with all process gases and vapors. 

The patented IsoSensor™ is a high stability flow sensor compatible with the elevated environmental temperatures found in heated gas lines and baking systems (temperature-controlled gas boxes). 

The ultra-low drift performance of the IsoSensor reduces the need for frequent re-zeroing and recalibration typical in high temperature applications. 

For maximum flexibility and inventory reduction, the 9861 Series remote electronics come standard with two analog electrical connectors (a 20 pin card edge and a 9 or a 15 pin “D” connector option) and Semi industry standard RS485 digital communication enabling easy retrofit and standardization. 

In mass flow controller models, a diaphragm free solenoid control valve provides a wide dynamic control range for superior precision and control. 

Designed for long-term reliability, the valve has been marathon tested to over 8 million cycles with no degradation in performance.

Benefits