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Single Stage, Pressure Regulator - QR4000 & NPR4000 Series
Brand: Parker HannifinThe QR4000 & NPR4000 are excellent choices for gas cabinets and bulk gas distribution. Designed for enhanced leak integrity and for applications involving negative delivery pressures.
Parker Veriflo Division’s QR4000 & NPR4000 Series are non-tied diaphragm, pressure reducing regulators that provide precise control of process gas resulting in a stable flow and pressure supply to downstream systems making it an excellent choice for valve manifold boxes, gas cabinets, and many semiconductor manufacturing applications.
Features- “VeriClean”, Veriflo’s custom low sulfur high purity 316L Stainless Steel™ enhances electropolishing, welding and corrosion resistance
- Unique compression member loads the seal to the body without requiring a threaded nozzle or additional seals to atmosphere
- Threadless internal nozzle assembly
- Metal-to-metal diaphragm to body seal assures high leak integrity
- Minimal particle generation and entrapment
- Positive upward and downward diaphragm stops
- Standard full internal electropolish
Specifications
Brand
Back-Up Washer Material
- 316 Stainless Steel
Body Material
- 316L Stainless Steel
Cap Material
- Nickel-Plated Brass
Compression Member Material
- Inconel 625
Diaphragm Material
- Hastelloy C-22
External Leak Rate
- < 2 x 10-10 Scc/sec He
Filter Screen Material
- Hastelloy C-22
Flow Capacity (Cv)
- Cv 0.06 (Standard), Cv 0.02, Cv 0.15
Internal Leak Rate
- < 4 x 10-⁸ Scc/sec He
Internal Volume (cc)
- 4.0 cc without Fittings
Knob Material
- Aluminum, ABS (Black) (QR4000) ABS (White) (NPR4000)
Maximum Inlet Pressure (psi)
- 250 Cv 0.06, Cv 0.02, Cv 0.15 (NPR4000) 400 Cv 0.06, Cv 0.02, Cv 0.15 (QR4000) 1250 Cv 0.15 (QR4001, 4002, 4004, 4005) 4000 Cv 0.06, 0.02 (QR4001-4005, 4015) 4000 Cv 0.15 (QR4003, QR4015)
Maximum Working Temperature (°C)
- 66° C PCTFE, 135° C PEEK, 260° C Vespel
Maximum Working Temperature (°F)
- 150° F PCTFE, 275° F PEEK, 500° F Vespel
Minimum Working Temperature (°C)
- -40° C
Minimum Working Temperature (°F)
- -40° F
Nut Material
- 316L Stainless Steel
Outlet Pressure
- 1-10 psig (0.07 barg), 1-30 psig (2 barg),1-60 psig (4 barg), 2-100 psig (7 barg),3-250 psig (17 barg), 5-150 psig (10 barg),20-500 psig (35 barg) (QR4000)100 Torr - 10 psig (-26 inHg - 0.7 barg) 100 Torr - 30 psig (-26 inHg - 2 barg) 100 Torr - 60
Pin Material
- Hastelloy C-22 (NPR4000 Only)
Poppet Material
- Hastelloy C-276
Poppet Spring Material
- Inconel X-750
Seat Material
- PCTFE (Standard), PEEK, Vespel
Seat Retainer Material
- 316L Stainless Steel
Supply Pressure Effect
- 0.23 psig / 100 psig (0.16 barg / 7 barg) (0.02 Cv) (QR4000) 0.6 [sig / 100 psig (0.04 barg / 7 barg) (0.06 Cv) (QR4000) 1.5 psig / 100 psig (0.1 barg / 7 barg) (0.15 Cv) (QR4000)
Weight (kg)
- 0.7
Weight (Lbs)
- 1.5
- Gas Cabinets
- Valve Manifold Boxes
- Bulk Gas Distribution
- Markets:
- Semiconductor Fab
- Gas Companies