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Model 5866RT Elastomer Sealed Pressure Controller/Flow Meter
Brand: Brooks InstrumentThe Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate.
Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure.
With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.
Features- Integral pressure transducer
- Response time: < 0.8 seconds
- Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
- Wide range of full scale pressures (Max pressure 1,500 psig)
- Optional metal seal available
- Electro-polished wetted surfaces (optional)
- Electrically activated valve override
- Suitable for upstream or downstream control
- Analog interface
Benefits
- Eliminates droop, hysteresis and boost
- High leak integrity
- More control over pressure and flow
- Dynamic tuning adjustments with top mounted DIP switches
Specifications
Brand
Flow Range (Full Scale Capacity)
- 0 - 3 sccm to 0 - 30,000 sccm N2 Eq.
Accuracy
- ±1% F.S. Including Linearity at the Calibration Conditions
- ±1.5% F.S. for Flow Rates Greater Than 20 slm
Repeatability
- ±0.25% of Rate
Valve Type
- Normally Closed
- Normally Open
- No Valve (Elastomer, Upstream Configuration Only)
Approvals & Certifications
- CE
- EMC Directive 89/336/EEC EN 61326-1
- PED 97/23/EC
Process Connection
- 1/8” or 1/4” Compression Fittings
- 1/4” VCO Male
- 1/4” VCR Male
Pressure Control Range
- 100:1 for A Remote Transducer with a 0-10 V Output
Pressure
- Max 1,500 psig
Temperature Range
- 0° to 65° C
Seal Material
- Elastomer or Metal
Wetted Material
- Standard 316L/316L VAR Stainless Steel
- Valve Seat: Standard Viton® Fluoroelastomers or Metal
- External/Internal Seals: Flouroelastomers or Metal
- Optional: Buna-N, Teflon® or Kalrez®
Analog Communication
- 0-5 V
Electrical Connection
- 15-Pin "D" Connector
Power Supply/Consumption
- Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA
- Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA
- Thin-film Processes
- Chemical Research
- Petrochemical Research
- Laboratory
- Fuel Cell
- Life Science