Microza Filtration Systems for CMP Wastewater

Pall Microza Hollow Fiber Filtration Systems remove all suspended solids from spent slurry wastewater. The clear filtration permeate may be discharged to sewage or, where required, treated to remove varying amounts of dissolved constituents, e.g., copper in copper CMP wastewater. The retained solids may be transferred to an existing sludge treatment system, or to a dedicated system for final dewatering. 

Pall can also provide fully automated turnkey installations for reclaiming or recycling of the permeate for cooling towers, for raw water, for water suitable for RO make-up, or for water suitable for recycling back to the CMP process.