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CMFC-9000 Coriolis Mass Flow Controller
Brand: Malema
The CMFC-9000 Series is a line of high-performance closed-loop flow controllers designed for use in a wide variety of high-purity liquids including DI water, harsh chemicals, and CMP polishing slurries.
A typical flow control module consists of a high-accuracy, advanced Coriolis flowmeter with a Malema control valve.
The Coriolis flowmeter has an all PFA construction with no moving parts or seals.
It sets a standard for flow measurement in terms of accuracy and repeatability.
The Coriolis flow measurement technology with its advanced digital signal processing ensures reliable performance even for process fluids with entrapped gasses.
The high speed/precision motor actuated pinch valve (for slurries) or diaphragm valve (for chemicals) helps provide a fast and precise response with minimal “overshoot”.
Its all PTFE (Polytetrafluoroethylene) construction and minimal dead volume ensure maximum process purity and reliability (chemical control valve).
Features- High Accuracy - Controls flowrate to within ± 1.5% of setpoint; ideal for fluid blending and/or dispense applications
- Fast Response 2 seconds (typically < 1 seconds for most applications)
- Broad application range with 2 types of control valves
- Wide range of flow control capability
- All PTFE/PFA wetted part construction – compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
- Mass flow measurement accuracy is independent of fluid density and viscosity
Specifications
Brand
Accuracy
- ± 1.5 % of Set Point or ± 3 G/min (Whichever is Larger) - for Room Temperature DIW
Alarm
- 200 mA at 30 Vdc, Max.
Ambient Temperature Range
- 0° to 40° C (32° to 104° F)
Applications
- Copper Plating Tools
- Semiconductor Industry
- Wet Cleaning Tools
Consumption
- 6 W - 250 mA at 24 Vdc
Enclosure, Body Material
- Acrylic
- Aluminum 6061 T6 (Anodized)
- PC
- PEEK
- Polypropylene
- PPS
- PVC
- PVDF
- Stainless Steel (Passivated)
- Vinyl
Environmental Protection
- IP64
Flow Rate
- 5 to 5,000 gpm (22.73 to 22,730.45 LPM)
Humidity
- 30 to 80 % Relative Humidity - Ambient
Input
- 24 Vdc ± 10 % - Power Supply
Input Signal
- 0-10 Vdc (Control)
- 0-5 Vdc (Control)
- 4-20 mA (Control)
Mounting Position
- Horizontal
- Vertical
Operating Pressure
- psig: 50 (kPa: 344.7, bar: 3.447) - Max.
Orifice Size
- > 2 mm
Output
- 0-10 Vdc - Flow Signal
- 0-5 Vdc - Flow Signal
- 4-20 mA - Flow Signal
Output Format
- Open Collector
Pressure Range
- psig: 70 (kPa: 482.6, bar: 4.826) - Max.
Repeatability
- ± 0.5 % of Set Point or ± 0.5 G/min (Whichever is Larger) - Control Repeatibility
Response Time
- < 2 seconds
Switch Type
- NPN
Temperature Range
- 16° to 50° C (60.8° to 122° F) - Fluid
Tube Inlet
- 1/4” Flare or Super Pillar 300
- 1/4” Tube
- 3/8” Flare or Super Pillar 300
- 3/8” Tube
Tube Outlet
- 1/4” Flare or Super Pillar 300
- 1/4” Tube
- 3/8” Flare or Super Pillar 300
- 3/8” Tube
Valve Type
- Diaphragm Valve
- Pinch Valve
Wetted Materials
- PFA - High Purity
- Plated Cured Silicone
- PTFE