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MFC-8100 Integrated Flow Control Module
Brand: MalemaThe MFC-8100 Series is a line of high-performance closed-loop flow controllers designed for use in a wide variety of high-purity liquids including DI water, harsh chemicals and CMP (Chemical Mechanical Planarization) slurry applications.
A typical module for chemicals combines Malema’s ultrasonic flow meter with a Malema control valve.
The ultrasonic flow meter has an all PFA (Perfluoroalkoxy) construction with no moving parts or seals.
It sets the standard for flow measurement in terms of accuracy, repeatability and turndown.
Malema’s DSP (Digital Signal Processing) technology ensures reliable performance even with a certain degree of bubbles present in the process fluids.
The high speed/precision control valve helps provide fast and precise response with minimal overshoot.
Malema’s control valve has an all PTFE (Polytetrafluoroethylene) construction and minimal dead volume that ensure maximum process purity and reliability.
Features- Less than 2 seconds response time [can be less than 100 msec]
- Capable of controlling a wide range of flow with turn-down as high as 100:1
- Controls flow rate within ±1% of set point
- Broad application range with 2 types of control valves
- Excellent for fluid blending and/or dispense applications
- Compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
- Longevity with minimal upkeep (Pinch tube replacement every 3 years or longer on slurry module)
- Slim package customized for easy installation on CMP tools (includes shut-off valve)
Specifications
Brand
Accuracy
- ± 1 % of Set Point or ± 2 mL/min (Whichever is Larger) - for Room Temperature DIW
Ambient Temperature Range
- 0° to 40° C (32° to 104° F)
Applications
- Copper Plating Tools
- Semiconductor CMP Tools
- Wet Cleaning Tools
Consumption
- 0.5 A, Max.
Current
- 0.9 A - Rush
Differential Pressure
- psid: 7 to 30 (kPa: 48.26 to 206.8, bar: 0.4826 to 2.068)
Enclosure, Body Material
- PEEK
- Polypropylene
- PVC
Flow Rate
- 0.01 to 0.53 gpm (50 to 2,000 mL/minute)
Humidity
- 30 to 80 % Relative Humidity - Ambient
Input
- 0-10 Vdc - Target Flow Rate
- 24 Vdc ± 10 % - Electrical
Input Signal
- 0-10 V (Control)
Mounting Position
- Horizontal
Operating Pressure
- psig: 50 (kPa: 344.7, bar: 3.447) - Max.
Orifice Size
- > 2 mm
Output
- 0-10 V - Flow Signal
- 0-10 Vdc - Fow Rate
Pressure Range
- psig: 70 (kPa: 482.6, bar: 4.826) - Max.
Repeatability
- ± 0.5 % of Set Point or ± 0.5 mL/min (Whichever is Larger) - Control Repeatability
- ± 1 % of Set Point or ± 1 mL/min (Whichever is Larger)
Response Time
- < 2 seconds
Temperature Range
- 10° to 60° C (50° to 140° F) - Fluid
Tube Inlet
- 3/8” Tube Flare Ends
Tube Outlet
- 1/4” Tube Flare Ends
Valve Type
- Diaphragm Valve
- Pinch Valve
Voltage
- 1,200 Vac at 1 mA, 1 Minute (Case & Power Terminal) - Withstand Voltage
Wetted Materials
- PFA
- Plated Cured Silicone
- PTFE