Yodify Product Library
Instantly add the XacTorr Series Capacitance Manometer and 50,000+ more product series to your store or catalog  
Book Your Demo and See How
or create your store

XacTorr Series Capacitance Manometer

Brand: Brooks Instrument

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument. 

XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. 

This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.
Features
  • Available for process ranges from 0.10 Torr to 1000 Torr
  • Multiple accuracy levels available
  • Patented Mark IV sensor
  • Digital architecture enables operation over a wide dynamic range with extremely good accuracy
  • Dual-zone temperature control improves measurement stability and repeatability
  • Multi-decade digital calibration provides superior window of known accuracy
  • Intelli-touch zero adjustment
  • Independent & easily accessible diagnostic service port
  • DeviceNet® and analog communication options
Benefits
  • Lower drift, superior protection from deposition of process gases
  • Elimination of manual potentiometers and drift associated with electronics
  • Fast warm-up, close temperature control, rapid response to changes
  • Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
  • Cannot be zeroed if pressure is too high or desired temperature not reached
  • Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting

Specifications

Approvals & Certifications

  • CE
  • EMC Directive 89/336/EEC
  • RoHS

Tube Connection

  • 1” O.D. Tube

VCR / VCO Connection

  • 1/2” VCR Female
  • 1/4” VCR Female

Pressure Range

  • 0.1 to 1,000 Torr

Accuracy

  • CMX0: 0.25% of Reading
  • CMX1, CMX2: 1 to 1,000 Torr Ranges = 0.15% of Reading
  • CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading

Exposed Material

  • Inconel
  • AISI 316L Stainless Steel

Digital Communication

  • DeviceNet™
  • RS485

Analog Communication

  • 0-10 Vdc 5k Ohm Load

Temperature

  • Max 160° C

  • Semiconductor Fabrication
  • Thin-film Deposition Processes – Glass, Web and Optical Coatings
  • Freeze Drying Perishable Materials
  • High-tech Toatings for Medical Instruments (Surgical Instruments, Dental Drills, etc.)
Instantly populate your store or catalog 
CREATE YOUR SITE
or book a demo with the Yodify Team
show more