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LFC-7000 Integrated Flow Control Module
Brand: Malema
The LFC-7000 Series is a line of high-performance closed-loop flow controllers designed for use in a wide variety of high-purity liquids including DI water, harsh chemicals, and CMP polishing slurries.
A typical module for high-accuracy control of ultrapure chemicals combines a Malema ultrasonic flowmeter, with accuracy rated at ±1% reading, with a Malema control valve.
The ultrasonic flowmeter has an all PFA construction with no moving parts or seals.
It sets a standard for flow measurement in terms of accuracy, repeatability, and purity. Its digital signal processing technology ensures reliable performance even with a certain degree of bubbles present in the process fluids.
The high speed/precision motor actuated pinch valve (for slurries) or diaphragm valve (for chemicals) helps provide a fast and precise response with minimal “overshoot”.
Its all PTFE (Polytetrafluoroethylene) construction and minimal dead volume ensure maximum process purity and reliability (chemical module).
Features- High Accuracy - Controls flowrate to within ± 1% of setpoint; ideal for fluid blending and/or dispense applications
- Fast Response 3 seconds (typically < 2 seconds for most applications)
- Broad application range with 2 types of control valves
- Wide range of flow control capability; 5 mL/min - 12000 mL/min (turndown can be as high as 100:1)
- All PTFE/PFA wetted part construction – insures compatibility with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
- Low maintenance - modules featuring ultrasonic flowmeters with NO moving parts provide the ultimate in “uptime” (slurry module with pinch tube replacement cycle of 3 years or longer)
Specifications
Brand
Accuracy
- ± 1 % of Set Point or ± 3 mL/min (Whichever is Larger) - for Room Temperature DIW
Alarm
- 200 mA at 30 Vdc, Max.
Ambient Temperature Range
- 0° to 40° C (32° to 104° F)
Applications
- Copper Plating Tools
- Semiconductor Industry
- Wet Cleaning Tools
Consumption
- 0.5 A mAximum
Differential Pressure
- psid: 7 to 30 (kPa: 48.26 to 206.8, bar: 0.4826 to 2.068)
Electrical Connectors
- 12-Pin Connector
Enclosure, Body Material
- Acrylic
- PEEK
- PPS
- PVC
- Vinyl
Environmental Protection
- IP64
Flow Rate
- 0.79 to 190.2 gph (50 to 12,000 mL/min)
Humidity
- 30 to 80 % Relative Humidity - Ambient
Input Signal
- 0-10 Vdc (Control)
- 4-20 mA (Control)
Mounting Position
- Horizontal
- Vertical
Operating Pressure
- psig: 50 (kPa: 344.7, bar: 3.447) - Max.
Orifice Size
- > 2 mm
Output
- 0-10 Vdc (Flow Signal)
- 4-20 mA (Flow Signal)
Output Format
- Open Collector
Power Supply
- 24 Vdc ± 10 %
Pressure Range
- psig: 70 (kPa: 482.6, bar: 4.826) - Max.
Process Temperature
- 10° to 60° C (50° to 140° F) - Fluid
Repeatability
- ± 0.5 % of Set Point or ± 0.5 mL/min (Whichever is Larger) - Control Repeatibility
- ± 1 % of Set Point or ± 1 mL/min (Whichever is Larger)
Switch Type
- NPN
Tube Connection
- 1/2” Tube
- 1/4” Tube
- 3/8” Tube
- Inlet/Outlet: 1/2” Flare Ends or Super Pillar 300
- Inlet/Outlet: 1/4” Flare Ends or Super Pillar 300
- Inlet/Outlet: 3/8” Flare Ends or Super Pillar 300
Update Time
- < 3 seconds - Flow Control Time
Wetted Materials
- PFA
- Plated Cured Silicone
- PTFE