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Add the FR1000 Series UHP Single Stage Pressure Reducing Regulator to your store or catalog  
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FR1000 Series UHP Single Stage Pressure Reducing Regulator

FR1000 Series UHP Single Stage Pressure Reducing Regulator

Brand: Parker Hannifin
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Veriflo Division’s FR1000 Series are non-tied diaphragm, pressure reducing regulators that offer low to intermediate flow capability with an inlet pressure up to 3500 psig. 

The FR1000 provides precise control of process gas resulting in a stable flow and pressure supply to downstream systems making it an excellent choice for valve manifold boxes, gas cabinets, and many semiconductor manufacturing applications. 

The standard Hastelloy C-22® diaphragm and integrated filtration promote long life performance while the metal-to-metal diaphragm seal assures high leak integrity. 

The FR1000 offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. 

The new line complements our current, premium QR4000 and HF1200 Series regulators, and in combination, will serve a wide range of applications in semiconductor fabrication.
Features
  • Metal-to-Metal Diaphragm Seal assures high leak integrity
  • Manufactured for ultra high purity gas delivery applications
  • 10 in. Ra Surface Finish
  • Passivated & Electropolished
  • Integrated Filtration
  • Hastelloy® diaphragm standard

Specifications

Brand

Body Material

  • 316L Stainless Steel, 316L Stainless Steel Double Melt

Diaphragm Material

  • Hastelloy C-22

Filter Material

  • Hastelloy C-22

Flow Coefficient (Cv)

  • 0.09, 0.15

Internal Leak Rate

  • 4 x 10 -8 Scc/sec He

Internal Volume (cc)

  • 0.49

Maximum Inlet Pressure (psig)

  • 3500

Number of Ports

  • 2

Operating Temperature (°F)

  • -40° to 150° F (-40° to 66° C)

Options

  • na, Hastelloy Trim (Poppet)

Outlet Pressure

  • 1-30 psig, 2-60 psig, 2-100 psig, 5-150 psig, 1-10 psig

Poppet Material

  • 316L Stainless Steel

Port Connection

  • Male, Male, Female, Female

Port Connection Type

  • 1/4" Face Seal, 3/8" Face Seal

Seat Material

  • PCTFE

Surface Finish (Ra)

  • 10 Ra Microinch (.25 Micrometer), 25 Ra (Optional)

  • Tool Hook-Up
  • Valve Manifold Boxes
  • Process Gas Cabinets
  • “Point of Use” pressure regulation

Documentation

Data Sheets

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