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Ultra-High Purity (UHP) High-Flow, High-Pressure Diaphragm Valve - 18R Series

Brand: Parker Hannifin

The 18R Series Diaphragm Valve provides excellent leak integrity and is ideal for use in UHP bulk delivery and specialty gas systems. 

Available in configurations with flow capacities up to 1.30 Cv and working pressures up to 1,500 psig.

Specifications

Actuator Housing Material

  • Aluminum

Body Material

  • VeriClean™ 316L Stainless Steel (Electro-Polished)

Bonnet Material

  • 17-4 Stainless Steel

Diaphragm Material

  • Sliver-Plated Beryllium Copper / Elgiloy or Equivalent

External Leak Rate

  • < 1 x 10^-9 Scc/sec He Inboard Test Method Production

Flow Capacity

  • Manual Cv 1.3Pneumatic Cv 1.0

Hand Wheel Material

  • Aluminum

Internal Leak Rate

  • < 4 x 10^-9 Scc/sec He Inboard Test Method

Internal Volume (cc)

  • 11.77

Lower Stem Material

  • VeriClean™ 316L Stainless Steel (Passivated)

Maximum Back Pressure (psig)

  • Maximum

Operating Pressure (psig)

  • Manual Vacuum to 1500 psig (103.4 barg)Pneumatic Vacuum to 1200 psig (82.7 barg)Actuator 70 psig (4.8 barg) Min. to 125 psig (8.6 barg) Max.

Piston Material

  • 303 Stainless Steel

Screw Material

  • 18-8 Stainless Steel

Seat Options

  • PCTFE (Standard) or Polyimide

Sleeve Material

  • Nylon

Spring Material

  • 316 Stainless Steel, Electro-Polished

Surface Finish (Ra)

  • 10 Micro inch Ra

Switch Option

  • AOPNCLSC 1/4 Amp at 115 Vac (Normally Closed) AOPNCLSO 1/2 Amp at 115 Vac (normally Open)

Switch Type

  • Single Pole, Single Throw (SPST) Momentary Action, Non-Adjustable26 AWG Wire, 7”, w/o Connector

Temperature Range (°F)

  • Manual -40° to 150° F (-40° to 65° C) Pneumatic +15° to 150° F (-9° to 65° C)

Test Methods

  • Production Leak Test Outboard Sniffer Probe at 1000-1500 psig, 20-25 % Helium

Upper Stem Material

  • Aluminum Silicon Bronze

Weight

  • Manual 1.85 lbs (0.84 kgs) Pneumatic 3.35 lbs (1.52 kgs)

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