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Ultra-High Purity (UHP) High-Flow, High-Pressure Diaphragm Valve - 18R Series
Brand: Parker HannifinThe 18R Series Diaphragm Valve provides excellent leak integrity and is ideal for use in UHP bulk delivery and specialty gas systems.
Available in configurations with flow capacities up to 1.30 Cv and working pressures up to 1,500 psig.
Specifications
Brand
Actuator Housing Material
- Aluminum
Body Material
- VeriClean 316L Stainless Steel (Electro-Polished)
Bonnet Material
- 17-4 Stainless Steel
Diaphragm Material
- Sliver-Plated Beryllium Copper / Elgiloy or Equivalent
External Leak Rate
- < 1 x 10^-9 Scc/sec He Inboard Test Method Production
Flow Capacity
- Manual Cv 1.3Pneumatic Cv 1.0
Hand Wheel Material
- Aluminum
Internal Leak Rate
- < 4 x 10^-9 Scc/sec He Inboard Test Method
Internal Volume (cc)
- 11.77
Lower Stem Material
- VeriClean 316L Stainless Steel (Passivated)
Maximum Back Pressure (psig)
- Maximum
Operating Pressure (psig)
- Manual Vacuum to 1500 psig (103.4 barg)Pneumatic Vacuum to 1200 psig (82.7 barg)Actuator 70 psig (4.8 barg) Min. to 125 psig (8.6 barg) Max.
Piston Material
- 303 Stainless Steel
Screw Material
- 18-8 Stainless Steel
Seat Options
- PCTFE (Standard) or Polyimide
Sleeve Material
- Nylon
Spring Material
- 316 Stainless Steel, Electro-Polished
Surface Finish (Ra)
- 10 Micro inch Ra
Switch Option
- AOPNCLSC 1/4 Amp at 115 Vac (Normally Closed) AOPNCLSO 1/2 Amp at 115 Vac (normally Open)
Switch Type
- Single Pole, Single Throw (SPST) Momentary Action, Non-Adjustable26 AWG Wire, 7”, w/o Connector
Temperature Range (°F)
- Manual -40° to 150° F (-40° to 65° C) Pneumatic +15° to 150° F (-9° to 65° C)
Test Methods
- Production Leak Test Outboard Sniffer Probe at 1000-1500 psig, 20-25 % Helium
Upper Stem Material
- Aluminum Silicon Bronze
Weight
- Manual 1.85 lbs (0.84 kgs) Pneumatic 3.35 lbs (1.52 kgs)