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Instantly add the UHP Diaphragm Valve - Manual or Air-Actuated (Vacuum to 300 psig) - 930 Series and 50,000+ more product series to your store or catalog  
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UHP Diaphragm Valve – Manual or Air-actuated (vacuum to 300 psig) – 930 Series

UHP Diaphragm Valve - Manual or Air-Actuated (Vacuum to 300 psig) - 930 Series

Brand: Parker Hannifin
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The 930 series Diaphragm Valve (1-1/8 inch body size) is available with a variety of manual operators and air-operated actuators. 

It provides excellent reliability, leak integrity & cleanliness making it ideal for use in UHP semiconductor applications.

Specifications

Brand

Actuation Pressure

  • 75 psig Nominal (5 barg)

Bake-Out Temperature (°C)

  • 121° C in the Open Position

Bake-Out Temperature (°F)

  • 250° F in the Open Position

Body Material

  • VeriClean 316L Stainless Steel

Burst Pressure

  • 375 psig (26 barg) (AOPLP, G)900 psig (62 barg) (AOPMP, K, L, I, M, S)

Cap Material

  • 17-4 Stainless Steel

Diaphragm Material

  • Elgiloy, Equivalent

External Leak Rate

  • ≤ 2 x 10-10 Scc/sec He

Flow Capacity (Cv)

  • Cv 0.3 (AOP), Cv 0.22 (Lever)

Housing Material

  • Anodized Aluminum

Input Voltage

  • 1/4 Amp at 115 Vac (normally Closed) (AOPLPLSC, AOPMPLSC)1/2 Amp at 115 Vac (normally Open) (AOPLPLSO, AOPMPLSO)

Internal Leak Rate

  • ≤ 1 x 10-9 Scc/sec He

Internal Volume (cc)

  • 2.64 cc

Lead Length (inch)

  • 7” Lead

Maximum Inlet Pressure (barg)

  • 8.6 barg (AOPLP, G) / 20.7 barg (AOPMP, K, L, I, M, S)

Maximum Inlet Pressure (psig)

  • 125 psig (AOPLP, G) / 300 psig (AOPMP, K, L, I, M, S)

Maximum Working Temperature (°C)

  • 66° C

Maximum Working Temperature (°F)

  • 150° F

Minimum Working Temperature (°C)

  • -40° C

Minimum Working Temperature (°F)

  • -40° F

Nut Material

  • 316L Stainless Steel

Proof Pressure

  • 188 psig (13 barg) (AOPLP, G)450 psig (31 barg) (AOPMP, K, L, I, M, S)

Seat Material

  • PCTFE (Standard), PEEK, Vespel

Switch Type

  • Single Pole, Single Throw (SPST)Momentary Action, Non-Adjustable

Weight (kg)

  • 0.8

Weight (Lbs)

  • 1.75

Wire Connection

  • 1/8” Strip Tinned Ends

Wiring

  • 26 AWG, UL Style 1061, Equal Twisted Pair

Documentation

Document

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