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Mass Flow Controllers
Brand: Azbil North America, IncGas mass flow controllers use detection units that combine advanced actuator control technologies and Azbil's own Micro Flow thermal mass-flow sensor.
Fast response is achieved over a wide range of flow-rate control thanks to the characteristics of µF sensors.
These controllers are suitable for use with low-pressure gas supplied for glass processing in manufacturing plants, fire control during brazing, and other processes that conventional mass flow controllers could not regulate easily.
Our diverse product lineup extends the scope of possible applications.
Features- Mass flow measurement
- These meters can measure the flow rate of air or gas and convert it to standard conditions regardless of the operating temperature and pressure.
- The flow rate converted to standard conditions is the volumetric flow rate at 1 atmosphere of pressure and 0°C [or 20 °C].
- Wide measurement range
- Conventional gas flowmeters generally experience more difficulty in measuring low flow rates than flow rates near their maximum limits.
- A wider range of measurement and control is made possible by Azbil's proprietary µF sensors.
- Rangeability is as high as 100:1 with CMS series mass flowmeters and 160:1 with CML series high-flow mass flowmeters (1,280:1 in terms of measurement range)!
- These mass flow meters are ideal for controlling air or gas consumption and saving energy by checking for leakage.
- Fast response
- A tiny MEMS sensor with a very small thermal mass is in direct contact with the gas in order to achieve a fast response.
- Reduced pressure loss
- Pressure loss in these meters is kept to a minimum by mounting the µF sensor in the channel wall to minimize protrusions and the resulting resistance against flow.
- Therefore, they are perfect for measuring and controlling gas flow at low pressures.
- High accuracy
- Our µF sensors experience almost no change in their characteristics over time, ensuring high accuracy over a long period.
- Various functions
- Our wealth of microcomputer technologies gained through the development of control devices provides a range of functions that are unprecedented in conventional mass flow meters.
- These functions include display of instantaneous or totalized flow rate, gas-type switching, high limit and low limit alarm output, Analog output, totalizer pulse output, and communication function. (Available functions depend on the particular product.)
- Extensive product lineup
- To meet customers' application needs, a wide variety of products is available to measure various flow rate ranges, from 0–5 mL/min up to 500 L/min.
Documentation
Product Manuals
Document
- Compact Digital Mass Flow Controller pdf 6.7 MB
- Compact Digital Mass Flow Controller Installation and configuration pdf 9.1 MB
- Compact Digital Mass Flow Controller RS 485 Communication pdf 4.4 MB
- Digital Mass Flow Controller pdf 7.7 MB
- Digital Mass Flow Controller Communication pdf 1.1 MB
- Digital Mass Flow Controller Further Notes on Semi Standard Gas Models pdf 235 KB
- Digital Mass Flow Controller semi standard gas models pdf 702 KB
- Digital Mass Flow Controller standard gas low flow range model pdf 674 KB
- Digital Mass Flow Controller standard gas medium flow range model pdf 609 KB
- Digital Mass Flow Controller Standard Gas Model pdf 1,016 KB
- Digital Mass Flow Controllers Further Notes on Model MQV0100 pdf 344 KB
- Digital MassFlow Controller For Hydrogen and Helium Gases pdf 1.2 MB
- Flowmeters Selection Guide pdf 3.1 MB
- Micro Flow F Gas Mass Flowmeter Selection Guide pdf 1.9 MB
- Panel Mount Mass Flow Controller pdf 461 KB
- Panel Mount Mass Flow Controller Installation and configuration pdf 1.7 MB