Yodify Product Library
Instantly add the UHP Surface Mount Diaphragm Valve - Manual or Air-Actuated (Vacuum to 250 psig) - SM955 Series and 50,000+ more product series to your store or catalog
Book Your Demo and See How
or create your store
UHP Surface Mount Diaphragm Valve - Manual or Air-Actuated (Vacuum to 250 psig) - SM955 Series
Brand: Parker HannifinThe SM955 Series Diaphragm Valve is available with a variety of manual operators and air-operated actuators.
It provides excellent reliability and leak integrity making it ideal for use in UHP semiconductor modular surface-mount system applications.
Specifications
Brand
Actuation Pressure
- 75 psig (5 barg) Nominal
Bake-Out Temperature (°C)
- 121° C in the Open Position
Bake-Out Temperature (°F)
- 250° F in the Open Position
Body Material
- VeriClean 316L Stainless Steel
Burst Pressure
- 375 psig (26 barg) (AOP)750 psig (52 barg) (Manual)
Cap Material
- 17-4 Stainless Steel
Diaphragm Material
- Elgiloy, Equivalent
External Leak Rate
- < 2 x 10-10 Scc/sec He
Flow Capacity (Cv)
- Cv 0.30 Standard (AOP)Cv 0.25 Standard (Manual)Cv 0.50 High Flow (AOP)Cv 0.35 High Flow (Manual)
Internal Leak Rate
- < 4 x 10-9 Scc/sec He
Internal Volume (cc)
- 0.70 cc
Maximum Inlet Pressure (psi)
- 125 psig (8.6 barg) (AOP)250 psig (17 barg) (Manual)
Maximum Working Temperature (°C)
- 66° C
Maximum Working Temperature (°F)
- 150° F
Minimum Inlet Pressure (psi)
- Vacuum
Minimum Working Temperature (°C)
- -40° C
Minimum Working Temperature (°F)
- -40° F
Nut Material
- 17-4 Stainless Steel
Proof Pressure
- 188 psig (13 barg) (AOP)375 psig (26 barg) (Manual)
Seat Material
- PCTFE (Standard), PEEK, Vespel
Surface Finish (Ra)
- 5 Micro inch Ra or Less
Weight (kg)
- 0.32
Weight (Lbs)
- 0.7