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GF80 Series Metal Sealed Thermal Mass Flow Controller/Meter
Brand: Brooks InstrumentFor many industrial and semiconductor processes, both performance and cost efficiency are crucial.
The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point.
Moving to a metal sealed MFC brings the full benefit of MultiFloTM multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely.
Features- Long-term zero stability of < ±0.5% full scale per year
- <1 second settling times
- Full-scale flow rates up to 300 slpm
- All-metal seal flow path - 16µ inch Ra surface finish
- Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
- Programmable MultiFloTM capability - one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
- Best-in-class temperature coefficient specification through active temperature compensation
- Embedded self-test routines and independent diagnostic/service port
- Slimline body with VCR fittings
- DeviceNetTM, Profibus®, RS-485 and analog interfaces
Benefits
- Fast <1 second flow settling time eliminates wasted gas and process variability
- No elastomer seals that can have oxygen permeation, requiring replacement over time
- MultiFloTM simplifies and streamlines changing process gases - no more removing and calibrating MFCs
- New gases and/or ranges can be set in under 60 seconds
- Measurement accuracy not affected by temperature variations
- Convenient access to diagnostics port for maximum uptime
- Compact size eases integration into tight machine spaces; excellent choice for retrofits
- Multi-protocol communication interface simplifies integration into existing systems
Specifications
Brand
VCR / VCO Connection
- 1/2” VCR
Approvals & Certifications
- CE EN 6126: 2006
- FCC Part 15 & Canada IC - Subset of CE Testing
- RoHS
Flow Range (Full Scale Capacity)
- 3 sccm to 55 slm
Accuracy
- ±1% S.P. 35-100%
- ±0.35% F.S. < 5-35%
Repeatability
- < ±0.2% S.P.
Linearity
- ±0.5% F.S. (Included in Accuracy)
Response Time
- Normally Closed Valve: <1 sec
Control Range
- < 5% to 100%
Zero Stability
- < ±0.5% F.S. Per Year
Wetted Material
- 316 Stainless Steel
- Hastelloy C-22
- 17-7 PH
- 430 Stainless Steel
- KM-45
Seal Material
- Metal
Level of Purity / Surface Finish
- 16µ inch Ra
Valve Options
- Normally Closed
- Meter (No Valve)
Maximum Temperature
- 50° C
Differential Pressure Range
- 3-860 sccm = 7-45 psid
- 861-7,200 sccm = 15-45 psid
- 7,201-50,000 sccm = 25-45 psid
- 51-300 slm = 30-90 psid (Typical Pressure Drops)
Maximum Pressure
- Standard GF Series: 150 psig (10 bar)
- High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)
Digital Communication
- DeviceNet™
- Profibus®
- RS485 S-Protocol
- RS485 L-Protocol
Electrical Connection
- Profibus/Analog via 9-Pin "D" Connector
- RS485/Analog via 9-Pin"D" Connector, 15-Pin "D" Connector
- DeviceNet™ via 5-Pin "M12" Connector
Power Supply/Comsumption
- RS485 12-24 Vdc/7 Watts Max or 3.3 Watts Max.
- Profibus 13.5-27 Vdc/7 Watts Max or 3.3 Watts Max.
- DeviceNet™ 11-25 Vdc/13.6 Watts Max or 3.3 Watts Max.
- Cost Efficient Retrofit/Upgrade of Legacy MFCs in Refurbished Semiconductor Process Tools
- Reduce MFC Inventory in Six-inch/Eight-inch Semiconductor Fabs
- MOCVD for LED and Power Device Manufacturing
- Solar/thin Film Chemical Vapor Deposition (CVD) Systems
- Analytical OEM Equipment
Documentation
Product Manuals
- Brooks GF80 / GF81 Mass Flow Controllers Product Manuals pdf 3.7 MB
- Brooks GF80 / GF81 Mass Flow Controllers Product Manuals- JA pdf 643 KB
- DeviceNet™ Supplemental Manual - GF40, GF80 pdf 893 KB
- EtherCAT® Supplemental Manual - GF40, GF80 pdf 3.9 MB
- RS485 L-Protocol Supplemental Manual - GF40, GF80 pdf 3.8 MB
- RS485 S-Protocol Supplemental Manual - GF40, GF80 pdf 864 KB