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FC-3000 Series Liquid Flow Control Unit
Brand: Tokyo Keiso Co, LtdFC-3000 Series is a control unit consisting of controller and control valve for the measurement and control of small liquid flow. Receiving the electric signal from flowmeter, the controller outputs the control signal to the control valve to keep a constant flow rate. The control valve, of which wetted parts are made of fluorocarbon resin, is resistant to corrosive liquids. This control unit has an excellent controllability of the small flow, with a quick response by following up to the changes of set point and other disturbances such as pressure fluctuation. Not only for semiconductor manufacturing process, the FC-3000 series is best suited for the control of chemical handling processes.
FeaturesControl Valve (FCV-3000)
- High corrosion resistance
- Precise control of small flow
- Infiltration resistant construction
Controller (FCA-3000)
- High speed control
- Flexible operation
Specifications
Brand
Ambient Temperature Range
- 5° to 50° C (41° to 122° F)
Enclosure, Body Material
- Controller: ABS Resin
Environmental Protection
- Controller: IP20
Power Supply
- 24 Vdc ± 10 %
Tube Connection
- 1/4" (6.35 mm) Tube - FCV-3000, FCV-1000S
- 12.7 mm Tube - FCV-1000S
- 2.8 mm Tube - FCV-3000T
- 4 mm Tube - FCV-3000T
- 4.35 mm Tube - FCV-3000
- 9.53 mm Tube - FCV-1000S