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Ultra-High Purity (UHP) High-Pressure Diaphragm Y-Valve - 945Y Series
Brand: Parker HannifinThe 945Y Series Diaphragm Y-valve combines two valves into a single compact body, which simplifies the integration of a purge system into a gas manifold and improves the effectiveness of the purge process in ultra-high purity semiconductor applications.
Specifications
Brand
Minimum Inlet Pressure (psi)
- Vacuum
Weight
- 0.98 kg (2.1 lbs)
Compression Member Material
- 316L Stainless Steel
Maximum Working Temperature
- 66°C (150°F)
Minimum Working Temperature
- -40°C (-40°F)
External Leak Rate
- ≤ 2 x 10⁻¹⁰ Scc/sec He
Proof Pressure
- 188 psig (13 barg) (NC, NO)
- 5,250 psig (362 barg) (HP, I, M)
Nut Material
- 316L Stainless Steel
Actuation Pressure
- 75 psig (5 barg) Nominal
Burst Pressure
- 375 psig (26 barg) (NC, NO)
- 10,500 psig (724 barg) (HP, I, M)
Air Inlet Size
- ⅛”-27 NPT
Body Material
- VeriClean 316L Stainless Steel
Internal Volume
- 4.26 cc
Surface Finish
- 10 Micro inch Ra
Maximum Inlet Pressure
- 125 psig (8.6 barg)
- 3,500 psig (241 barg)
Flow Capacity (Cv)
- Cᵥ 0.18 (Process Valve, Lever (M)
- Cᵥ 0.17 (Purge Valve)
- Cᵥ 0.25 (Process Valve, HP, NC, NO, I)
Diaphragm Material
- Elgiloy, Equivalent
Internal Leak Rate
- ≤ 1 x 10⁻⁹ Scc/sec He
Seat Material
- PCTFE (Standard), PEEK, Vespel
Housing Material
- Anodized Aluminum
Cap Material
- 17-4 Stainless Steel