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PR-23-MS Semicon Process Refractometer

Brand: K-Patents Process Instruments

K-Patents Semicon Process Refractometer PR-23-MS has a built-in, ultra-pure, modified PTFE flow cell designed to keep all metal and corroding parts from coming into contact with the process liquid. All the wetted parts are made of ultra-pure, modified PTFE. The prism material is sapphire.

The PR-23-MS is mounted directly in-line with a pillar or flare fitting. The compact design allows integration to a wet bench or to a cabinet, where the need for foot print area is very low. 

The dissolved solids concentration is determined by making an optical measurement of the solution’s Refractive Index. The advantage of this principle is that the same instrument can be used to measure any chemical.

The PR-23-MS provides a continuous 4-20 mA or digital measurement signal and immediate feedback to the control system, if the chemical is not within specifications. The PR-23-MS is physically small and easy to install in the bulk chemicals dispense, and in point of use chemical blending, spiking and monitoring applications.
Features
  • PR-23-MS is applied to process control and monitoring at the bulk chemical systems and in the in-situ wet process tools (blending, clean, etch and CMP).
  • Compact and mounted direct in-line without filtering. The measurement is not influenced by particles, bubbles, turbulent flow or impurities in the ppm range.
  • Provides a continuous measurement signal, 4-20 mA or digital.
  • Full measurement range Refractive Index nD 1.3200 – 1.5300, which corresponds to 0-100 % by weight. Optional range with nD 1.2600–1.4700 for strong HF.
  • Typical accuracy of 0.1% by weight, e.g. for HCl in water. For multi-component solutions, the measurement signal works as a check-sum.
  • Patented CORE-optics (US Patent No. US6067151): no drift, no re-calibration, no mechanical adjustments.
  • Dual connectivity: one transmitter can operate two sensors. A second sensor can be easily integrated later.
  • Ethernet connection and remote panel for data-logging and remote operation.
  • Process temperature range: -20°C – 150°C (-4°F – 300°F)
  • Fast process temperature measurement by built-in Pt1000 and automatic temperature compensation.
  • ATEX approved for Zone II, area classification EX II 3 G EEx nA II T4.
  • FM approved for Class I, Div. 2, Groups A, B, C and D, T6.
  • CSA certified for Class I, Div. 2, Groups A, B, C and D, T4.
  • cCSAus certified for Electrical Safety, Sensor: Class I, Pollution Deg. 3; Transmitter: Class I, Pollution Deg. 2; Installation Cat. II.

Specifications

Accuracy

  • R.I. ± 0.0002 (Corresponds Typically to ± 0.1 % by Weight)

Alarms / Wash Relays

  • Two Built-In Signal Relays, Max.

Ambient Temperature Range

  • Indicating Transmitter: 0° to 50° C (32° to 122° F)
  • Sensor: -20° to 45° C (-4° to 113° F)

Approval for Electrical Safety

  • CSA (C, US) Certified, Equipment Class I, Poll. Degree 2 / Transmitter, Poll Degree 3 / Sensor, Install. Cat. II

Approvals for Hazardous Locations

  • ATEX: Certified for Zone 2 Area, Ex II 3 G, EEx NA II T4 (Non-Sparking / Non-Incendive Version), Certified for Zone 0 Area, Ex II 1 G, EEx ia IIC T4 Ga (Intrinsically Safe Version)
  • CSA Certified for Class I, Div. 2, Groups A, B, C, D, T4
  • FM (C, US) Certified for Class I, Div. 1, Groups A, B, C, D, T4
  • FM Certified for Class I, Div. 2, Groups A, B, C, D, Locations, T6
  • IECEx Certified, Ex NA II T4, Ex ia IIC T4 Ga

Cable Fittings to Indicating Transmitter

  • European Cable Glands M20 x 1.5 or US Conduit Hubs

Current Output

  • 4-20 mA - Max.
  • Galvanic Isolation 1,500 Vdc or AC (Peak), Hold Function During Prism Wash

Display

  • 320 x 240 Pixel Graphical LCD with LED Backlight, Keypad with 8 Membrane Keys

Ethernet Connection

  • 10/100 Mbit/second, Data Acquisition over UDP/IP Protocol with Data Acquisition Software

Instrument Verification

  • With Standard R.I. Liquids & K-Patents Documented Procedure (ISO 9000)

Interconnecting Cable

  • IEC 61158-2 Compliant 2-Wire Cable

Interconnecting Cable Length

  • 33 feet (10 metres) Standard
  • Maximum

Patent

  • German Patent DE19855218
  • US Patents US6067151 & US6760098B2

Patented Core-Optics

  • 589 Nm Wavelength (Sodium D-Line) Light Emitting Diode (LED)
  • Built-In Pt-1000 Temperature Sensor (Linearization According to IEC 751)
  • No Mechanical Adjustments & Digital Measurement with 3648 Pixel CCD Element

Power

  • 24 Vdc, 30 VA (Optional)
  • AC Input: 100-240 Vac, 50/60 Hz

Process Line Connection

  • Flare Fitting or Nippon Pillar Super 300 Typical Fitting: 1”
  • Flare Fitting or Nippon Pillar Super 300 Typical Fitting: 1/2”
  • Flare Fitting or Nippon Pillar Super 300 Typical Fitting: 1/4”
  • Flare Fitting or Nippon Pillar Super 300 Typical Fitting: 3/4”

Process Pressure

  • PN 10

Process Temperature

  • -20° to 160° C (-4° to 320° F)

Refractive Index Range

  • Full Range, ND=1.3200 to 1.5300 (Corresponds to 0 to 100 % by Weight), Sapphire H73 Prism (Standard)
  • nD = 1.2600 to 1.4700, Sapphire H74 Prism (For Hydrofluoric Acid, HF)

Remote Functions

  • Altering Configuration & Parameter Settings
  • Diagnostic Messages
  • Remote Display & Access to Real-Time Measurement Values
  • Up-Grading Program Versions Via Ethernet Connection

Repeatability

  • nd= ± 0.0001 (Corresponds Typically to ± 0.05 % by Weight)

Sensor Connectivity

  • One or Two Sensors can be connected to One DTR

Sensor Housing

  • Epoxy Coated Stainless Steel

Sensor Protection Class

  • IP67
  • NEMA 4

Sensor Wetted Parts

  • Modified PTFE
  • O-Ring: Kalrez
  • Prism Gasket Modified PTFE
  • Prism, Adaptor: Sapphire

Speed of Response

  • 1 second Undamped, Damping Time Selectable up to 5 minutes

Temperature Compensation

  • Automatic, Digital Compensation

Transmitter Protection Class

  • Enclosure IP66
  • NEMA 4X
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