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UHP Diaphragm Valve - Manual or Air-Actuated (Vacuum to 250 psig) - 955 Series
Brand: Parker HannifinThe 955 Series Diaphragm Valve is available with a variety of manual operators and air-operated actuators.
The Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications.
Specifications
Brand
Actuation Pressure
- 75 psig (5 barg) Nominal
Air Inlet Size
- 1/8” NPT
Body Material
- VeriClean 316L Stainless Steel
Burst Pressure
- 750 psig (52 barg)
Cap Material
- 17-4 Stainless Steel
Diaphragm Material
- Elgiloy, Equivalent
External Leak Rate
- ≤ 2 x 10-10 Scc/sec He
Flow Capacity (Cv)
- Cv 0.55
Housing Material
- Anodized Aluminum
Internal Leak Rate
- ≤ 4 x 10-9 Scc/sec He
Internal Volume (cc)
- 3.29 cc (Including Face Seal Fittings)
Maximum Inlet Pressure (barg)
- 8.62 barg (AOPLPNO, G)17.22 barg (AOPLPNC, I, L, M)
Maximum Inlet Pressure (psig)
- 125 psig (AOPLPNO, G)250 psig (AOPLPNC, I, L, M)
Maximum Working Temperature (°C)
- 66° C
Maximum Working Temperature (°F)
- 150° F
Minimum Working Temperature (°C)
- -40° C
Minimum Working Temperature (°F)
- -40° F
Nut Material
- 316L Stainless Steel
Proof Pressure
- 375 psig (26 barg)
Seat Material
- PCTFE (Standard), PEEK, Vespel
Surface Finish (Ra)
- 5 Micro inch Ra
Weight (kg)
- 0.36
Weight (Lbs)
- 0.81