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Ultra-High Purity (UHP) High-Flow Diaphragm Valve - 970 Series
Brand: Parker HannifinThe 970 Series Diaphragm Valve offers high cycle life and exceptional leak integrity.
It can be manually or air-operated and is ideally suited for use in high-flow ultrahigh-purity semiconductor tool.
Specifications
Brand
Actuation Pressure
- 70 to 125 psig
Actuator Housing Material
- Anodized Aluminum
Air Inlet Size
- 1/8” NPT
Body Material
- VeriClean 316L Stainless Steel
Burst Pressure
- 750 psig (52 barg)
Cap Material
- 17-4 pH Stainless Steel
Diaphragm Material
- Elgiloy
External Leak Rate
- ≤ 2 x 10-10 Scc/sec He
Flow Capacity (Cv)
- Cv .7
Internal Leak Rate
- ≤ 1 x 10-9 Scc/sec He
Internal Volume (cc)
- 0.59
Maximum Inlet Pressure (psi)
- Manual 250 psig (17.22 barg) AOP 150 psig (10 barg)
Maximum Working Temperature (°C)
- 66° C
Maximum Working Temperature (°F)
- 150° F
Minimum Inlet Pressure (psig)
- Vacuum
Minimum Working Temperature (°C)
- -40° C
Minimum Working Temperature (°F)
- -40° F
Nut Material
- 17-4 pH Stainless Steel
Proof Pressure
- 375 psig (26 barg)
Seat Material
- PCTFE
Surface Finish (Ra)
- 5 Micro inch
Weight (kg)
- 0.65
Weight (Lbs)
- 1.44