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Mega-One LM Low Pressure Manual Valves

Brand: Fujikin of America

MEGA Valves are ideal for a wide range of applications in semiconductor manufacturing or other equipment and facilities requiring ultra-pure production in a hazardous environment with flammable or toxic fluid lines. 

No matter the gas or fluid application, there is a MEGA Valve for the job
Features
  • Multi-colored handles
  • End-connections
  • Various internal options 
  • Minimal internal volume 
  • Indicating Handwheel
  • Alloy diaphragm 
  • PCTFE seat
  • Stringent leakage standards

Specifications

Available Sizes

  • 1/4”
  • 3/8”
  • 1/2” (tube-stub)

Surface Finish

  • 7 Ra average
  • 10 Ra Max.

Tested Durability

  • Over 20000 cycles

Body

  • Stainless Steel 316L

Diaphragm

  • Nickel-cobalt alloy

Standard Seat

  • PCTFE

Optional Seat

  • Polyimide, PFA

Handle

  • Aluminum alloy

Maximum Operating Pressure

  • 145 psi (1 MPa)

Min Operating Pressure

  • Vacuum

Temperature Range

  • 14 F - 176 F (-10 C - 80 C)

Maximum Cv

  • 0.3 (1/4”)/0.65 (3/8” & 1/2”)

Leakage Across Seat (Design)

  • 1 x 10^-10 scc/sec He

Leakage Across Seat (Tested)

  • < 5 x 10^-11 scc/sec He

Inboard Leakage (Design)

  • 2 x 10^-10 scc/sec He

Inboard Leakage (Tested)

  • < 5 x 10^-11 scc/sec He

Documentation

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