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K-Patents Semicon Process Refractometer, PR-33-S

PR-33-S Semicon Process Refractometer

Brand: K-Patents Process Instruments
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K-Patents Semicon Process Refractometer PR-33-S monitors the fab chemicals' concentration in cleanroom environment and in the integrated process tools (blending, clean, etch, and CMP).The PR-33-S consists of an ultra-pure, modified PTFE flow cell body and an Ethernet cable that any standard PoE (Power-over-Ethernet) switch can use to transmit power to the sensor and data to a computer.

The PR-33-S monitors chemical concentrations in real-time and provides an Ethernet output signal and immediate feedback, if the chemical is out of specifications. For example, low and high concentration alarms may be configured to control and increase bath life. The concentration is determined by making an optical measurement of the solution’s Refractive Index nD and temperature. 

The PR-33-S is mounted directly in-line with a flare or pillar fitting. The PR-33-S has a compact, metal-free construction and it only needs a small footprint area.
Features
  • PR-33-S is used for process control and monitoring.
  • Compact and mounted directly in-line. The measurement is not influenced by particles, bubbles or turbulent flow and impurities in the ppm range.
  • Provides a continuous Ethernet output signal; 4-20 mA outputs available as option.
  • Full measurement range Refractive Index nD 1.3200–1.5300, which corresponds to 0-100 % by weight. Optional range nD 1.2600–1.4700 for strong HF.
  • Typical accuracy R.I.+ 0.0002, which typically corresponds to 0.1% by weight, e.g. for HCl in water.
  • N.I.S.T. traceable calibration, verification with standard R.I. liquids and K-Patents documented procedure (ISO 9000).
  • Patented CORE-optics (US Patent No. US6067151): no drift, no re-calibration, no mechanical adjustments.
  • Remote panel via Ethernet for data-logging and remote operation.
  • The communication is built by the standard UDP/IP protocols.
  • Process temperature range: -20° to 85° C (-4° to 185° F).
  • Fast process temperature measurement by built-in Pt1000 and automatic digital temperature compensation.

Specifications

Brand

Accuracy

  • R.I. ± 0.0002 (Corresponds Typically to ± 0.1 % by Weight)

Ambient Temperature Range

  • -20° to 45° C (-4° to 113° F)

Ethernet Connection

  • 10/100Base-T Ethernet

Instrument Verification

  • NIST Traceable Calibration, Verification with Standard R.I. Liquids & K-Patents Documented Procedure (ISO 9000)

Output Unit

  • Conc %
  • g/l
  • nD
  • R.I. (Refractive Index)

Outputs & Connections

  • IEEE 802.3af PoE (Power over Ethernet) for Power Supply & Data Transfer, Directly Connectable to an Ethernet LAN (Local Area Network)

Patent

  • German Patent DE19855218
  • US Patents US6067151 & US6760098B2

Patented Core-Optics

  • 589 Nm Wavelength (Sodium D-Line) Light Emitting Diode (LED)
  • Built-In Pt-1000 Temperature Sensor (Linearization According to IEC 751)
  • No Mechanical Adjustments & Digital Measurement with 3648 Pixel CCD Element

Power Consumption

  • Maximum

Process Connection

  • Flare Fitting or Nippon Pillar Super 300 Typical Fitting: 1”
  • Flare Fitting or Nippon Pillar Super 300 Typical Fitting: 1/2”
  • Flare Fitting or Nippon Pillar Super 300 Typical Fitting: 1/4”
  • Flare Fitting or Nippon Pillar Super 300 Typical Fitting: 3/4”

Process Temperature

  • -20° to 85° C (-4° to 185° F)

Refractive Index Range

  • nD = 1.2600 to 1.4700, Sapphire H74 Prism (For Hydrofluoric Acid HF)
  • nD = 1.3200 to 1.5300 (Corresponds to 0 to 100 % by Weight), Sapphire H73 Prism (Standard)

Remote Functions

  • Data Acquisition through UDP/IP
  • Remote Access with a Web Browser

Repeatability

  • ± 0.0001 (Corresponds Typically to ± 0.05 % by Weight)

Sensor Cable

  • Cable Length 33 feet (10 metres)
  • Cable Typical Cat 5e Ethernet with RJ45 Connector
  • FEP-Covered Ethernet Cable between Sensor & PoE Switch
  • PVDF Sensor Cable Gland

Sensor Housing

  • Ultra-Pure Kynar PVDF

Sensor Protection Class

  • IP67
  • NEMA 4X

Sensor Wetted Parts

  • Modified PTFE
  • O-Ring: Kalrez
  • Prism Gasket Modified PTFE
  • Prism, Adaptor: Sapphire

Speed of Response

  • 1 second Undamped, Damping Time Selectable up to 5 minutes

Temperature Compensation

  • Automatic, Digital Compensation
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