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The Model SL-900 Series Ultrasonic Micro-measurement System is an ideal solution for the detection and measurement of ultra-pure chemical fluids in the semiconductor industries.

The SL-900 Series provides single or multiple discrete point levels with a very high degree of precision. The SL-900 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors.
Features
  • 316L stainless steel machined sensor body
  • Sensor material has an electropolished finish (Ra = 25 μin – minimum)
  • Miniature sensor size reduces liquid
  • Volume displacement
  • Works with the following chemicals independent of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA
  • High pressure vessel application up to 250 psig (1724 kPa) (consult factory for higher pressure applications)
  • Accuracy of each discrete point level is ±2 mm
  • Repeatability of ±1 mm is typical
  • Single point low level as close as 1/4" (6 mm) from bottom of vessel for 5/8" tube and 5/16" for 1/2" tube

Specifications

Accuracy

  • ± 0.078” (± 2 mm)

Applications

  • High Pressure Vessels
  • Pharmaceuticals
  • Semiconductor Industry

Cable Length

  • 3 to 20 feet (0.91 to 6.09 metres)

Current

  • Sink: 50 mA - Max.

Electrical Contacts

  • Normally Closed
  • Normally Open (Dry Contacts)

Enclosure Finish

  • Electro-Polishing

Environmental Protection

  • IP10
  • NEMA 1

Input Power

  • 115/230 Vac, 50/60 Hz
  • 24 Vdc, 50/60 Hz

Insertion 'U' Length

  • Standard Sensor Insertion Length: 6” to 12” (15.24 to 30.48 cm), Lengths of 12” to 24” are available at an Additional Charge

Operating Pressure

  • psig: 0 to 250 (kPa: 0 to 1,724, bar: 0 to 17.24)

Output

  • Relay: 0.5 A

Pressure Range

  • bar: 0 to 17.2
  • kPa: 0 to 1,724
  • psi: 0 to 250

Repeatability

  • ± 0.039” (± 1 mm) Typical

Sensor, Probe Material

  • Sensor: 316L Stainless Steel

Sensor, Probe Style

  • Ultrasonic

Size

  • Tube Size: 1/2” O.D.
  • Tube Size: 5/8” O.D.

Temperature Range

  • Electronics: -29° to 77° C (-20° to 170° F)
  • Sensor: -29° to 93° C (20° to 200° F)

VCR / VCO Connection

  • 1/2” VCR Female (Nut)
  • 1/2” VCR Male (Plug)
  • 3/4” VCR Female (Nut)
  • 3/4” VCR Male (Plug)

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