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​HFM-D-300A / HFC-D-302A Digital "A" Flow Controller for Low Flow​

Brand: Teledyne Hastings Instruments

HFM-D-300A / HFC-D-302A mass flow instruments have flow ranges from 0-5 sccm to 0-25 slm; use all metal seals, provide analog and digital outputs, and are constructed of stainless steel. 

Easy, user friendly digital communications with windows based software interface available.

Self diagnostics of the sensor, valve and overflow are included in the digital features. 

Also of interest is the auto zero feature which detects when the valve is closed and automatically resets the zero. 

These mass flow meters and controllers can store up to 10 calibrations of different ranges and gases. 

Another feature is the built in totalizer for monitoring gas usage under user set conditions.

Specifications

​Range

  • 0 - 5 sccm to 0 - 25 slm

Accuracy

  • 0.5 % of Reading + 0.2 % of Full Scale

Repeatability

  • + 0.15 % of Full Scale

Maximum Working Pressure

  • 500 psig

Analog I/O

  • ​​0-5 Vdc
  • ​​0-10 Vdc
  • 0-20 mA
  • 4-20 mA

Digital I/O

  • ​RS-232
  • RS-485

Analog Connector

  • 15-Pin subminiature D

Wetted Materials

  • 316L Stainless Steel
  • Nickel 200
  • 304 Stainless Steel
  • 302 Stainless Steel
  • Kalrez

  • Leak Testing
  • Thin Film Deposition
  • High Purity Gas Delivery
  • Thermal Flame Spray
  • Gas Blending
  • Pharmaceutical Process
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