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MASFLO-OVAL II Thermal Mass Flowmeter/Controller
Brand: Oval Corporation
Features
- Wide flow range: 5 NCCM (mL/min [normal]) to 500 NLM (L/min [normal])
- Optimal full scale adjustment available with laminar flow element
- Capable of measuring most gases except for highly corrosive gases
- Fast Response
- The control valve equipped on the mass flow controller is of normally-closed electromagnetic type to provide fast response and safety
- Compatible with a wide variety of applications when combined with the readout unit
Specifications
Brand
Enclosure, Body Material
- Body: 316 Stainless Steel - SUS316
Maximum System Pressure
- psi: 143.6 to 5685.5 (kPa: 990 to 39,200, bar: 9.9 to 392)
Power Supply
- ± 15 Vdc
Seat / Seal Material
- Seal: Chloroprene Rubber (CR)
- Seal: Fluororubber (FKM)
- Seal: Perfluoroelastomer (FFKM)