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The Micro Flow Mass Flow Meter Series employs a detection unit featuring the µF sensor, a thermal mass-flow sensor designed by Azbil for measuring gas flow.

These inexpensive mass flow meters provide unprecedented high precision and wide rangeability thanks to extensive use of the company's micro-machining technologies, as well as integration of the Micro Flow sensor and advanced channel-design technologies.

They are ideal tools for controlling the flow rate or measuring the per-building consumption of fuel gas, various types of industrial gas, or plant air used for virtually anything from manufacturing processes to test equipment.
Features
  • Mass flow measurement
    • These meters can measure the flow rate of air or gas and convert it to standard conditions regardless of the operating temperature and pressure.
    • The flow rate converted to standard conditions is the volumetric flow rate at 1 atmosphere of pressure and 0°C [or 20 °C].
  • Wide measurement range
    • Conventional gas flowmeters generally experience more difficulty in measuring low flow rates than flow rates near their maximum limits.
    • A wider range of measurement and control is made possible by Azbil's proprietary µF sensors.
    • Rangeability is as high as 100:1 with CMS series mass flowmeters and 160:1 with CML series high-flow mass flowmeters (1,280:1 in terms of measurement range)!
    • These mass flow meters are ideal for controlling air or gas consumption and saving energy by checking for leakage.
  • Fast response
    • Response is fast because the sensor is in direct contact with the gas.
  • Reduced pressure loss
    • Pressure loss in these meters is kept to a minimum by mounting the µF sensor in the channel wall to minimize protrusions and the resulting resistance against flow.
    • Therefore, they are perfect for measuring and controlling gas flow at low pressures.
  • High accuracy
    • Because of their high accuracy over a wide range of flows, mass flow meters have a specified accuracy for their reading (rdg).
  • Various functions
    • Our wealth of microcomputer technologies gained through the development of control devices provides a range of functions that are unprecedented in conventional mass flow meters.
    • These functions include display of instantaneous or totalized flow rate, gas-type switching, high limit and low limit alarm output, Analog output, totalizer pulse output, and communication function. (Available functions depend on the particular product.)
  • Extensive product lineup
    • To meet customers' application needs, a wide variety of products is available to measure various flow rate ranges, from 0–500 mL/min to 0–1,600 m³/h.
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