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Instantly add the GF40 Series Elastomer Sealed Thermal Mass Flow Controller/Meter and 50,000+ more product series to your store or catalog  
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GF40 Series Elastomer Sealed Thermal Mass Flow Controller/Meter

Brand: Brooks Instrument
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Multiple gases in one device equals maximum process flexibility and productivity. 

The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy. 

It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
Features
  • Programmable multi-gas/multi-range capabilities
  • Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
  • Sub-1 second flow response time and accuracy of 1% set point for demanding applications
  • Well suited for a variety of gases
  • Fast response, Hastelloy sensor
  • Easily accessible diagnostic service port is independent of tool communication
  • Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
Benefits
  • MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
  • MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
  • OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
  • Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
  • Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
  • User-accessible service port simplifies troubleshooting and diagnostic tasks
  • Variety of elastomer seals provide cost performance flexibility across range of applications
  • Multi-protocol communication interface supports integration into existing systems

1 - 12 of 20 Part Numbers
EW-32618-02
EW-32618-02
Brooks GF040 Digital Mass Flow Controller, 11-30 sccm, N2.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Nitrogen
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 0.03
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 0.011
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32618-04
EW-32618-04
Brooks GF040 Digital Mass Flow Controller, 31-92 sccm, N2.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Nitrogen
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 0.092
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 0.031
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32618-18
EW-32618-18
Brooks GF040 Digital Mass Flow Controller, 11-30 sccm, O2.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Oxygen
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 0.03
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 0.011
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32618-24
EW-32618-24
Brooks GF040 Digital Mass Flow Controller, 281-860 sccm, O2.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Oxygen
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 0.86
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 0.281
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32618-30
EW-32618-30
Brooks GF040 Digital Mass Flow Controller, 15-30 LPM, O2.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Oxygen
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 30
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 15
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32618-34
EW-32618-34
Brooks GF040 Digital Mass Flow Controller, 11-30 sccm, Ar.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Argon
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 0.03
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 0.011
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32618-36
EW-32618-36
Brooks GF040 Digital Mass Flow Controller, 31-92 sccm, Ar.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Argon
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 0.092
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 0.031
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32618-58
EW-32618-58
Brooks GF040 Digital Mass Flow Controller, 2.6-7.2 LPM, He.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Helium
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 7.2
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 2.6
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32618-62
EW-32618-62
Brooks GF040 Digital Mass Flow Controller, 15-30 LPM, He.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Helium
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 30
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 15
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32619-12
EW-32619-12
Brooks GF040 Digital Mass Flow Controller, 7.2-15 LPM, H2.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Hydrogen
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 15
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 7.2
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32619-14
EW-32619-14
Brooks GF040 Digital Mass Flow Controller, 15-30 LPM, H2.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Hydrogen
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 30
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 15
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
EW-32619-18
EW-32619-18
Brooks GF040 Digital Mass Flow Controller, 11-30 sccm, CO2.
  • Accuracy - ±1% of set point at 35 to 100%, ±0.35% of full-scale at 2 to 35%
  • Communications - RS-485
  • Display type - None
  • Electrical Connections - 5 pin M8 with threaded coupling nut / 2 x RJ45
  • Gas type - Carbon Dioxide
  • Leak Integrity - 1x10-9 cc/sec He
  • Material Fitting - 316 Stainless Steel
  • Material O-Ring - Kalrez
  • Material Valve - Kalrez
  • Max Flow Rate (LPM) - 0.03
  • Max Operating Temperature (° C) - 50
  • Max Operating Temperature (° F) - 122
  • Max Pressure (PSI) - 150
  • Min Flow Rate (LPM) - 0.011
  • Min Operating Temperature (° C) - 5
  • Min Operating Temperature (° F) - 41
  • Output - 4 to 20 mA
  • Output (mA) - Yes
  • Power - 13.5 to 27
  • Process Connection - 1/4" compression
  • Repeatability - < 0.2% of Set Point
  • Wetted Materials - 316 SS, Hastelloy C-22, 17-7 PH, 430 SS
1 - 12 of 20 Part Numbers

View_Details

Specifications

Brand

Flow Range (Full Scale Capacity)

  • 3 sccm to 50 slpm (N2 Eq.)

Flow Accuracy

  • ± 1% of SP 35-100%
  • ± 0.35% of FS 2-35%

Repeatability/Reproducibility

  • < ± 0.20% SP

Linearity

  • ±0.5% FS (Included in Accuracy)

Response Time

  • Normally Closed Valve: < 1 sec (within 2% for Steps 0-10 Through 0-100%)
  • Normally Open Valve < 3 sec (within 2% for Steps 0-10 Through 0-100%)

Control Range

  • 2 to 100%

Zero Stability

  • < ±0.5% FS Per Year

Temperature Range

  • 5° to 50° C (41° to 122° F)

Maximum Operating Pressure

  • 150 psig (10 bar)

Differential Pressure Range

  • 3 to 860 sccm (7 to 45 psid)
  • 861 to 7,200 sccm (15 to 45 psid)
  • 7,201 to 50,000 sccm (25 to 45 psid)

Wetted Material

  • 316 Stainless Steel
  • Hastelloy C-22
  • 1707 PH
  • 430 SS

Seal Material

  • Viton, Buna, Kalrez, EPDM or Neoprene

Surface Finish

  • 32µ inch Ra

Valve Options

  • Normally Closed
  • Normally Open
  • Meter (No Valve)

Communication

  • DeviceNet, EtherCAT®, Profibus®, RS485

Power Supply/Comsumption

  • Analog / RS-485: 12-24 Vdc, 7 Watt/8 Watt
  • DeviceNet™: 11-25 Vdc, 7 Watt/8 Watt
  • EtherCAT® / Profibus®:  13.5-27 Vdc, 7 Watt/8 Watt

Certifications & Approvals

  • CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE Testing) Safety EN61010-1
  • RoHS Directive (2011/65/EU)
  • REACH Directive EC 1907/2006

  • Solar Cell Chemical Vapor Deposition Systems
  • Life Sciences Bioreactors 
  • Vacuum Processes
  • Nanotechnology/MEMS Fabrication
  • Plasma, Glass and Web Coating Systems
  • Excellent Option for Manifold/Gas Delivery Systems

Documentation

Data Sheets

Product Manuals

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