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Instantly add the FR1400 Series UHP Single Stage, High Flow, Pressure Reducing Regulator and 50,000+ more product series to your store or catalog  
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FR1400 Series UHP Single Stage, High Flow, Pressure Reducing Regulator

FR1400 Series UHP Single Stage, High Flow, Pressure Reducing Regulator

Brand: Parker Hannifin
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Veriflo Division’s FR1400 Series regulators are tied diaphragm, single stage, pressure reducing regulators that offer high flow capability with an inlet pressure up to 3000 psig. 

They are an excellent choice for cylinder or point of use bulk and specialty gas applications.

The large, tied Hastelloy C-22® diaphragm provides stable control over its full operational range while providing a robust seal for hazardous gas applications.

The FR1400 Series offers the same quality, reliability, and performance levels expected of Parker products, at a highly competitive price point. 

The new FR line complements our current, premium QR4000 and HF1200 Series regulators, and in combination, will serve a wide range of applications in semiconductor fabrication.
Features
  • 316L stainless steel body
  • Manufactured for ultra high purity semiconductor gas applications
  • Metal-to-metal diaphragm seal
  • 10 μ in. Ra surface finish
  • Passivated & electropolish
  • Tied diaphragm design
  • Hastelloy C-22® diaphragm standard
  • Flows up to 800 slpm (28 scfm)

Specifications

Brand

Body Material

  • 316L Stainless Steel, 316L Stainless Steel Double Melt

Burst Pressure

  • 9,000 psig

Diaphragm Material

  • Hastelloy C-22

External Leak Rate

  • 2 x 10-10 Scc/sec He

Flow Coefficient (Cv)

  • 0.5

Internal Leak Rate

  • 4 x 10-⁸ Scc/sec He

Maximum Inlet Pressure (psig)

  • 3000, 300

Number of Ports

  • 2

Outlet Pressure

  • 1-30 psig, 5-60 psig, 10-100 psig, 15-150 psig

Poppet Material

  • Hastelloy C-22

Poppet Spring Material

  • Inconel

Port Connection

  • Male, Male, Female, Female

Port Connection Type

  • 3/8” Face Seal, 1/2” Face Seal, 1/2” Tube Stub

Proof Pressure

  • 4,500 psig

Seat Material

  • PCTFE

Seat Retainer Material

  • 316L Stainless Steel, Hastelloy C-22

  • Tool Hook-Up
  • Valve Manifold Boxes
  • Gas Cabinets
  • “Point of Use” Pressure Regulation

Documentation

Data Sheets

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