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CLFC 300 Series Flow Controller
Brand: Tokyo Keiso Co, Ltd
The CLFC 300 series is flow controller which integrates all functions of an ultrasonic flowmeter, a control valve, and a circuit for flow computation and valve control. Its control function can quickly follow the target flow rate. Thus, the CLFC300 is ideal for liquid control which is essential in semiconductor manufacturing for the constant supply of chemicals and flow control of DIW and slurry.
Features- Flow measurement is stabilized by faster calculation and im proved bubble resistance
- A quick step response is achieved by state-of-the-art signal processing technology. The CLFC300 tracks variations in the flow and returns it to the set point within 1.5 seconds
- A needle valve is available for chemical liquids and DIW, and a pinch tube valve for slurry liquids
- The STA-PURE style pcs tube is adopt to the lineup of pinch tubes. This tube has excellent durability and does not need to be replaced regularly
- An ultrasonic flowmeter, a control valve, and a circuit are all contained in a single case. In addition, the layout was revised to make the controller more compact: it is now 20% smaller and 35% lighter
Specifications
Brand
Approvals & Certifications
- CE
- EMC EN 61326-1: 2006
- RoHS
Consumption
- Maximum
Environmental Protection
- IP20
- IP54
Power Supply
- 24 Vdc ± 10 %
Process Connection - Other
- 1/4” Super300 Pillar Fitting & 1/4” Flare Typical Fitting
Range
- Flow Range: 2.5 to 2,000 mL/min
Wetted Materials
- PFA
- PTFE (Pinch Tube)