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TALYS ASP310 Wet Bath Monitoring Analyzer
Brand: ABB GroupThe TALYS- ASP300 series represents the latest generation of process analyzers for the Semiconductor industry.
It provides semiconductor, LED and solar cell manufacturing with superior performance offered at a cost suitable for today’s tightening budgets.
The high performance results of the TALYS ASP300 series permits equipment operators and engineers to reduce chemical usage while minimizing excursion events with real time bath component predictions.
Features- Simplicity of operation eliminates the need for analyzer experts, runs 24/7 with data displayed on tool monitor
- Reagent free operation reduces cost of ownership
- Low cost solution meets available budgets
- No wetted parts sampling eliminates the need for tubing modifications and ensures contamination control
- Flexibility allows the analyzer’s electronic configuration file to be uploaded from email for additional bath monitoring routines
- Multiple bath chemistries can be monitored at one sample point, reducing the number of analyzers required
Specifications
Brand
Communication
- Modbus TCP
Ambient Temperature
- 15° to 35° C
Humidity
- < 95 % Relative Humidity, Non-Condensing
Mounting
- Wall or shelf Mounting
Power Consumption
- < 100 W in routine Operatio
Certifications & Approvals
- CTÜVUS, CE, FCC, laser safety FDA/IEC/EN 60825-1, RoHS, WEEE
Dimensions (H x W x D)
- 369 x 350 x 255.5 mm
Weight
- 20 kg (Primary analyzer Enclosure)
- 1 kg (ClippIR and fiber combined)
- For real time, in bath, monitoring of a wet etching, cleaning, and PR removal bath