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Mega-One LA Pneumatically-Actuated Valves

Brand: Fujikin of America

MEGA Valves are ideal for a wide range of applications in semiconductor manufacturing or other equipment and facilities requiring ultra-pure production in a hazardous environment with flammable or toxic fluid lines. 

No matter the gas or fluid application, there is a MEGA Valve for the job
Features
  • Color Text Marking
  • End-Connections
  • Various Internal Options
  • Minimal Internal Volume
  • Unique Rotating Actuator 
  • Alloy Diaphgram
  • PCTFE Seat
  • Stringent Leakage Standards

Specifications

Available Sizes

  • 1/4”, 3/8”, 1/2” (tube-stub)

Surface Finish

  • 7 Ra average, 10 Ra Max.

Tested Durability

  • Over 4 million cycles

Maximum Operating Pressure

  • 145 psi (1 MPa)

Min Operating Pressure

  • Vacuum

Temperature Range

  • 14 F 176 F (-10 C 80 C)

Body

  • Stainless Steel 316L

Diaphragm

  • Nickel-cobalt alloy

Maximum cv

  • 0.25 (1/4”) / 0.60 (3/8” & 1/2”)

Leakage Across Seat (Design)

  • 1 x 10 10 scc/sec He

Standard Seat

  • PCTFE

Optional Seat

  • Polyimide, PFA

Actuator

  • Aluminum alloy

Leakage Across Seat (Tested)

  • < 5 x 10-11 scc/sec He

Inboard Leakage (Design)

  • 2 x 10 10 scc/sec He

Inboard Leakage (Tested)

  • < 5 x 10 11 scc/sec He

Documentation

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