UCUF-E Series Ultrasonic Flowmeter

The UCUF-E series ultrasonic flowmeter is designed for measuring small flow rates of ultrapure water and chemical liquids. It is comprised of the UCUF-E detector and SFC converter. All wet parts of the detector are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism such as O-rings which would accumulate liquid components.

The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing which requires ultimate cleanliness. The SFC converter significantly reduces the effect of bubbles in liquid, which cause problems in semiconductor and chemical processes. It has an adjustment function to off set the effector the kinematic viscosity of liquids, making the converter compatible with various chemicals. The RS485 communication function enables integrated management of the process.