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M4SI High Purity Diaphragm Valve
Brand: ROTAREX
Features
- 100% Helium Leak Test performed
- Assembling, testing & Packaging in cleanroom: Class ISO 4
- Reverse seat design for high life cycle
- Individual serial number for full traceability
- Electropolished surface roughness per SEMI F19 UHP Grade
- Fluid specific seat material as standard options
- Low internal volume
- Constant bleed option available
- 316L VAR® stainless steel double melt per SEMI F20 option available
- Additional Multi-port options
- 270° multiturn handwheel with open/close indicator
Specifications
Brand
Enclosure / Body Material
- 316L Stainless Steel
- Monel
- Hastelloy
- VAR
Material of Construction
- Seat: PCTFE, PVDF, VESPEL
- Diaphragm & Backup Diaphragm: Phynox
- Handwheel: Aluminum
- Actuator Bosy: 316L Stainless Steel or Aluminum
- Others: Stainless Steel or Alloys
- Piston: Brass, Aluminum, Stainless Steel
- O-Ring: NBR
Temperature Range
- -40° to 150° C (-40° to 302° F)
Maximum Working Pressure
- 10 to 240 bar
End Connection
- Metal Face Seal 1/4” Female
- Metal Face Seal 1/4” Male
- BWO 1/4”
- BWO 6 mm
- Compression Tube Fitting
Flow Capacity
- 0.2 Cv
Burst Pressure
- > 700 bar (10,152 psig)